Pad Conditioner Improves CMP Efficiency

"Optimization of CMP processes is typically carried out using monitor wafers with off-line analysis of wafer surfaces for defects and quality. Confluense has tackled the limitations of that approach with a pad conditioning system designed to improve the utilization efficiency of CMP consumables by reducing the average residence time of spent materials."
Daily News; Semicon West 2009; Wednesday July 15th, 2009; published by Semiconductor International

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CMP Optimization and Control Through Real-time Analysis of Process Effluents

S.J. Benner and D.W Peters
NCAVS 2009, July 15, 2009

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