Pad Conditioner Improves CMP Efficiency"Optimization of CMP processes is typically carried out using monitor wafers with off-line analysis of wafer surfaces for defects and quality. Confluense has tackled the limitations of that approach with a pad conditioning system designed to improve the utilization efficiency of CMP consumables by reducing the average residence time of spent materials."
Daily News; Semicon West 2009; Wednesday July 15th, 2009; published by Semiconductor International
CMP Optimization and Control Through Real-time Analysis of Process EffluentsS.J. Benner and D.W Peters
NCAVS 2009, July 15, 2009